Surface Contamination Analysis - List of Manufacturers, Suppliers, Companies and Products

[Analysis Case] Evaluation of Metal and Organic Contamination on Wafer Surface

Comprehensive evaluation based on the analysis results of multiple methods.

Foreign substances attached to manufacturing equipment or parts can affect product defects and equipment operation issues. By properly analyzing and evaluating these foreign substances, we can investigate the causes of their occurrence and improve the defects. This document presents a case study of the complex analysis of contamination attached to the surface of Si wafers using ICP-MS and SWA-GC/MS. SWA (Silicon Wafer Analyzer) -GC/MS is a method that heats the wafer in an electric furnace to gasify organic substances, which are then measured using GC/MS.

• Company：一般財団法人材料科学技術振興財団　MST
• Price：Other

• Contract Analysis